CKTBM1500/4/85N1I

Name: GLVAC CKTBM1500/4/85N1I
Brand: GLVAC
SKU: CKTBM1500/4/85N1I

Servo motor integrated variable vacuum capacitor — CKTBM/YL-M series for automatic RF matching and remote control

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Motorized Vacuum Capacitor series family image; this model's body and terminations may differ.

TECHNICAL DOCUMENTS

Motorized Vacuum Capacitor series

Motorized Vacuum Capacitor Datasheet

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3D STEP Model

STEP file on request

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B2B · GLVAC · TECHNICAL BRIEFREF · IMB · MOTORIZED VACUUM CAPACITOR · CKTBM1500/4/85N1I

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ABOUT MOTORIZED VACUUM CAPACITOR

Series overview

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GLVAC Motorized Vacuum Capacitors (CKTBM/YL-M); variable + servo motor + feedback. Automatic capacitance adjustment. 8 models; Cmax 250-2000 pF, peak 4-15 kV, tuning 2-10 s.

GLVAC Motorized Vacuum Capacitors integrate servo motor + position feedback into classical variable (CKTB/YL) bodies. RF controller or software adjusts automatically.

Required for semiconductor plasma processes. Typical interface: step motor (RS-485/analog), potentiometer/encoder feedback, 2-10 s full range, 0.1-0.5 pF accuracy.

APPLICATION AREAS

Semiconductor plasma automatic matching (CCP/ICP)Computer-controlled RF generatorRemote-controlled broadcast transmitterAutomatic antenna tuningIndustry 4.0 RF power systemsScientific research plasma experiments

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