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GLVAC Motorized Vacuum Capacitor — Semiconductor plasma automatic matching (CCP/ICP)
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GLVAC Motorized Vacuum Capacitor

Servo motor integrated variable vacuum capacitor — CKTBM/YL-M series for automatic RF matching and remote control

GLVAC Motorized Vacuum Capacitors integrate servo motor + position feedback into classical variable (CKTB/YL) bodies. RF controller or software adjusts automatically.
Required for semiconductor plasma processes. Typical interface: step motor (RS-485/analog), potentiometer/encoder feedback, 2-10 s full range, 0.1-0.5 pF accuracy.
Semiconductor plasma automatic matching (CCP/ICP)Computer-controlled RF generatorRemote-controlled broadcast transmitterAutomatic antenna tuningIndustry 4.0 RF power systemsScientific research plasma experiments
01type
Motorlu (servo motor + geri besleme) vakum kapasitör
02feedback
Potansiyometre veya enkoder
03cmax range
250 pF – 2000 pF
04tuning speed
2 – 10 saniye tam aralık
05control interface
RS-485 / analog (step motor)
06peak test voltage
4 – 15 kV
07position accuracy
0.1 – 0.5 pF
01

Motorized Vacuum Capacitor Series Contactor Models

Sorted by current rating (150A → 1000A)

8 MODELS
MODEL↑ currentContinuous Current (A)cmax pfcmin pfpeak test kvrf working kvtuning speed s
CKTBM1500/4/85N1I
85150015042.45
CKTBM250/15/94N1I
94250251593
CKTBM500/12/94N1I
9450050127.23
YL115-15-1000CM
2001000401597
YL56-20-100M
721001020122
YL56-4-1500M
9515005042.45
YL67-3-2000M
95200010031.86
YL75-9-1500M
95150015095.45

TECHNICAL DIFFERENTIATORS

Why MOTORLU-VAKUM-KAPASITOR Series?

Automatic RF Matching

    Semiconductor Plasma Optimized

      Remote Control & Industry 4.0

        DATASHEET · GUIDE · APPLICATION NOTE

        MOTORLU-VAKUM-KAPASITOR Series — Technical Resources

        CKTBM250/15/94N1I Datasheet

        • CKTBM250/15/94N1I DatasheetSOON

        CKTBM500/12/94N1I Datasheet

        • CKTBM500/12/94N1I DatasheetSOON

        CKTBM1500/4/85N1I Datasheet

        • CKTBM1500/4/85N1I DatasheetSOON

        YL56-20-100M Datasheet

        • YL56-20-100M DatasheetSOON

        YL56-4-1500M Datasheet

        • YL56-4-1500M DatasheetSOON

        YL67-3-2000M Datasheet

        • YL67-3-2000M DatasheetSOON

        YL75-9-1500M Datasheet

        • YL75-9-1500M DatasheetSOON

        YL115-15-1000CM Datasheet

        • YL115-15-1000CM DatasheetSOON

        FREQUENTLY ASKED QUESTIONS

        About the MOTORLU-VAKUM-KAPASITOR series

        RELATED INSIGHTS · MOTORLU-VAKUM-KAPASITOR
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        03 ENTRIES

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